{"id":5445,"date":"2021-09-16T03:14:48","date_gmt":"2021-09-16T03:14:48","guid":{"rendered":"https:\/\/www.bronkhorst-china.com\/?post_type=blog&p=5445"},"modified":"2023-01-18T03:31:21","modified_gmt":"2023-01-18T03:31:21","slug":"5445","status":"publish","type":"blog","link":"https:\/\/www.bronkhorst-china.com\/blog\/5445\/","title":{"rendered":"\u91d1\u521a\u77f3\u6c89\u79ef HFCVD\u6280\u672f"},"content":{"rendered":"

<\/h2>\n\n\n\n
\u91d1\u521a\u77f3\u5177\u6709\u8010\u78e8\u6027\uff0c\u56e0\u6b64\u91d1\u521a\u77f3\u6d82\u5c42\u901a\u5e38\u7528\u4e8e\u6539\u5584\u5207\u5272\u5de5\u5177\u548c\u8010\u78e8\u635f\u90e8\u4ef6\u7684\u6027\u80fd\u3002\u4e3a\u4e86\u83b7\u5f97\u5408\u9002\u57fa\u6750\u4e0a\u7684\u91d1\u521a\u77f3\u6d82\u5c42\uff0c\u5fc5\u987b\u5c06\u9002\u91cf\u5bf9\u7684\u6c14\u4f53\u6d82\u5c42\u6df7\u5408\u5e76\u52a0\u70ed\u4f7f\u5176\u53d1\u751f\u53cd\u5e94\u3002<\/strong>\n\n\n\n\n
 \n

\u6fc0\u53d1\u6c14\u76f8\u7684\u65b9\u6cd5\u6709\u5fae\u6ce2\u7b49\u79bb\u5b50\u4f53\u3001\u706b\u7130\u55b7\u5c04\u6216\u6fc0\u5149\u3002\u672c\u6837\u518c\u8bf4\u660e\u5c06\u6d89\u53ca\u70ed\u4e1d\u6c14\u76f8\u6c89\u79ef\u6280\u672f\uff08HFCVD\uff09\u3002\u901a\u5e38\u5728\u8be5\u65b9\u6cd5\u4e2d\uff0c\u542b\u78b3\u6c14\u4f53\u5982\u7532\u70f7\u5728\u6c22\u6c14\u4e2d\u7684\u7a00\u91ca\u6df7\u5408\u7269\u5728\u4e9a\u5927\u6c14\u538b\u4e0b\u901a\u8fc7\u70ed\u4e1d\u70ed\u6d3b\u5316\u3002\u6c14\u4f53\u6df7\u5408\u7269\u548c\u6d41\u91cf\u5fc5\u987b\u8c28\u614e\u63a7\u5236\uff1b\u56e0\u6b64\uff0c\u4f7f\u7528\u9ad8\u6027\u80fd\u70ed\u5f0f\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u52bf\u5728\u5fc5\u884c\u3002<\/p><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n

\"\"<\/strong><\/td>\n<\/tr>\n
<\/td>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>
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\u5e94\u7528\u8981\u6c42<\/h3>\n

\u91cd\u8981\u7684\u662f\u6240\u7528\u7684\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u53ef\u4ee5\u786e\u4fdd\u5408\u9002\u7684\u6c14\u4f53\u603b\u91cf\u548c\u5de5\u827a\u7684\u91cd\u590d\u6027\uff1b\u5426\u5219\uff0c\u6240\u83b7\u8584\u819c\u7684\u5747\u5300\u6027\u548c\u6574\u4f53\u8d28\u91cf\u5c06\u5927\u6253\u6298\u6263\u3002\u4eea\u8868\u5fc5\u987b\u975e\u5e38\u53ef\u9760\u5e76\u5177\u6709\u6a21\u62df\u6216\u6570\u5b57\u901a\u4fe1\uff0c\u56e0\u4e3a\u6d41\u7a0b\u4e2d\u6c14\u4f53\u7684\u53ef\u71c3\u6027\u548c\u7206\u70b8\u6027\u6d89\u53ca\u5230\u5b89\u5168\u95ee\u9898\uff0c\u5fc5\u987b\u8fdb\u884c\u4e25\u5bc6\u7684\u63a7\u5236\u548c\u76d1\u6d4b\u3002<\/p><\/td>\n

<\/td>\n\n

\u91cd\u8981\u8bae\u9898<\/h2>\n
    \n
  • \u4f18\u5316\u7684\u91cd\u590d\u6027<\/li>\n
  • \u9ad8\u7cbe\u5ea6<\/li>\n
  • \u5feb\u901f\u54cd\u5e94<\/li>\n
  • \u9ad8\u7a33\u5b9a\u6027<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
    \n\n\n\n
    \n

    \u5de5\u827a\u65b9\u6848<\/h2>\n

    \u7528\u4e8e\u91d1\u521a\u77f3\u8584\u819c\u751f\u4ea7\u7684\u901a\u7528\u7684\u65b9\u6cd5\u4e4b\u4e00\u662f\u70ed\u4e1d\u6c14\u76f8\u6c89\u79ef\u6280\u672f(HFCVD) <\/span>\uff0c\u5176\u4e2d\u6c14\u4f53\u6df7\u5408\u7269\u6cbf\u7740\u52a0\u70ed\u52302400\u00baC<\/span>\u7684\u957f\u957f\u7ec6\u7ec6\u7684W\u6216Ta<\/span>\u7ebf\uff08\u2205100 \u5230 300 \u03bcm) \u901a\u8fc7\u800c\u88ab\u52a0\u70ed\u3002<\/span><\/p>\n

    (HFCVD) <\/span>\u901a\u5e38\u4ec5\u9700\u4e24\u79cd\u6c14\u4f53\uff1aH2\u548cCH4\uff0c\u7532\u70f7\u5728\u6c22\u6c14\u4e2d\u4ee51 vol% \u81f3 2 vol%\u7a00\u91ca\u3002HFCVD\u53cd\u5e94\u5668\u5185\u7684\u603b\u538b\u529b\u901a\u5e38\u572820 mbar \u81f3 200 mbar\u4e4b\u95f4\u53d8\u5316\uff0c\u603b\u6d41\u91cf\u53d6\u51b3\u4e8e\u53cd\u5e94\u5668\u7684\u5c3a\u5bf8\u548c\u51e0\u4f55\u5f62\u72b6\u3002<\/p>\n

    (HFCVD) <\/span>\u4e0e\u5fae\u6676\u91d1\u521a\u77f3\u8584\u819c(MCD)\u76f8\u53cd\uff0c\u91d1\u521a\u77f3\u6d82\u5c42\u7c7b\u578b\u88ab\u79f0\u4e3a\u7eb3\u7c73\u6676\u91d1\u521a\u77f3(NCD)\u3002NCD\u7684\u7279\u5f81\u5728\u4e8e\u7eb3\u7c73\u5fae\u6676\u5c3a\u5bf8(1 nm \u5230 50 nm)\u548c\u6781\u5176\u5149\u6ed1\u7684\u8868\u9762\uff0c\u5176\u4fdd\u7559\u4e86MCD\u7684\u786c\u5ea6\u5e76\u76f8\u5bf9\u4e8eMCD\u5177\u6709\u6539\u5584\u7684\u8010\u78e8\u635f\u548c\u8010\u6469\u64e6\u6027\u80fd\u3002\u8fd9\u4e9b\u6d82\u5c42\u901a\u5e38\u9700\u8981\u6dfb\u52a0\u7b2c\u4e09\u60f0\u6027\u6c14\u4f53\uff0c\u901a\u8fc7\u5728\u751f\u4ea7\u671f\u95f4\u6539\u53d8\u8154\u5ba4\u5185\u6c14\u4f53\u7684\u70ed\u8d1f\u8377\u6765\u589e\u5f3a\u518d\u6210\u6838\u8fc7\u7a0b\u800c\u6709\u52a9\u4e8eNCD\u7684\u5f62\u6210\uff0c\u4e5f\u5f71\u54cd\u57fa\u677f\u52a0\u70ed\u3002\u8be5\u7cfb\u7edf\u6bd4MCD\u7cfb\u7edf\u66f4\u52a0\u590d\u6742\uff0c\u5728\u8fdb\u6599\u6c14\u4f53\u7684\u63a7\u5236\u548c\u76d1\u6d4b\u4e2d\u9700\u8981\u500d\u52a0\u6ce8\u610f\u3002<\/p>\n

    (HFCVD) <\/span>\u8fd9\u7c7b\u53cd\u5e94\u5668\u7684\u8fdb\u4e00\u6b65\u4fee\u6539\u5305\u62ec\u5728\u5f62\u6210\u671f\u95f4\u7528\u787c(MCD\u548cNCD)\u63ba\u6742\u91d1\u521a\u77f3\u6d82\u5c42\u4ee5\u4f7f\u5176\u5bfc\u7535\u3002\u901a\u5e38\u7528\u5230\u542b\u787c(B)\u7269\u8d28\u7684\u6db2\u4f53\u5e76\u4e14\u901a\u8fc7\u8f7d\u6c14\u9f13\u6ce1\u5c06\u787c\u84b8\u6c7d\u5e26\u5230\u70ed\u4e1d\u548c\u91d1\u521a\u77f3\u6d82\u5c42\u4e2d\u3002\u901a\u8fc7\u9009\u62e9\u5408\u9002\u7684\u787c\u6d53\u5ea6\u5e76\u8c03\u8282\u901a\u8fc7\u7684\u6c14\u4f53\u6765\u8c03\u8282\u63ba\u6742\u6c34\u5e73\u3002\u5728\u8fdb\u884cNCD\u65f6\uff0c\u56e0\u4e3a\u6d89\u53ca\u4e09\u79cd\u6c14\u4f53\uff0c\u4efb\u52a1\u53d8\u5f97\u8d8a\u53d1\u56f0\u96be\u3002\u70ed\u5f0f\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\uff08\u4f8b\u5982EL-FLOW Select, LOW-dP-FLOW \u6216 INFLOW\u7cfb\u5217)\u5728\u6b64\u7c7b\u5e94\u7528\u6216\u4efb\u4f55\u5176\u5b83\u6d89\u53ca\u6c14\u76f8\u751f\u6210\u91d1\u521a\u77f3\u7684CVD\u5de5\u827a\u4e2d\u626e\u6f14\u7740\u4e0d\u53ef\u6216\u7f3a\u7684\u89d2\u8272\u3002<\/p>\n

    Read more about thermal technology using the bypass principle<\/i><\/a><\/p><\/td>\n

    		<\/td>\n\"\"<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
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