{"id":6079,"date":"2022-09-07T02:07:54","date_gmt":"2022-09-07T02:07:54","guid":{"rendered":"https:\/\/www.bronkhorst-china.com\/?post_type=blog&#038;p=6079"},"modified":"2022-09-07T02:10:20","modified_gmt":"2022-09-07T02:10:20","slug":"flow-pressure-control-for-plasma-reactors","status":"publish","type":"blog","link":"https:\/\/www.bronkhorst-china.com\/blog\/flow-pressure-control-for-plasma-reactors\/","title":{"rendered":"\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u7684\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236"},"content":{"rendered":"<table style=\"width: 99.9999%;border-collapse: collapse\" border=\"0\">\n<tbody>\n<tr>\n<td style=\"width: 50%;vertical-align: top\">\u7b49\u79bb\u5b50\u4f53\u9664\u4e86\u4f5c\u4e3a\u4e00\u79cd\u81ea\u7136\u73b0\u8c61\uff0c\u8fd9\u79cd\u8ff7\u4eba\u7684\u7269\u7406\u6548\u5e94\u4e5f\u53d1\u751f\u5728\u6211\u4eec\u65e5\u5e38\u751f\u6d3b\u4e2d\u4f7f\u7528\u7684\u4ea7\u54c1\u7684\u5236\u9020\u8fc7\u7a0b\u3002\u4f8b\u5982\uff1a\u624b\u673a\u3001\u7535\u8111\u3001\u592a\u9633\u80fd\u7535\u6c60\u677f\u548c\u73bb\u7483\u7a97\u3002\n<p>\u7b49\u79bb\u5b50\u4f53\u5de5\u827a\u4e2d\u4f1a\u4f7f\u7528\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u3002\u6c14\u4f53\u6d41\u91cf\u3001\u84b8\u6c7d\u6d41\u91cf\u548c\u538b\u529b\u5728\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u4e2d\u8d77\u7740\u91cd\u8981\u4f5c\u7528\u3002\u8fdb\u5165\u53cd\u5e94\u5668\u7684\u6c14\u4f53\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236\u7531\u6d41\u91cf\u63a7\u5236\u5668\u548c\u538b\u529b\u63a7\u5236\u5668\u8c03\u8282\u3002\u6d41\u91cf\u63a7\u5236\u5668\u63a7\u5236\u8fdb\u5165\u53cd\u5e94\u5ba4\u7684\u6c14\u4f53\u6d41\u91cf\uff0c\u5728\u53cd\u5e94\u5ba4\u6c14\u4f53\u88ab\u6fc0\u53d1\u6210\u7b49\u79bb\u5b50\u4f53\uff0c\u538b\u529b\u63a7\u5236\u5668\u5c06\u8fc7\u91cf\u6c14\u4f53\u4ece\u53cd\u5e94\u5ba4\u4e2d\u6392\u51fa\uff0c\u540c\u65f6\u4fdd\u6301\u538b\u529b\u3002<\/p><\/td>\n<td style=\"width: 50%\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-6085\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Picture1-1.jpg\" alt=\"\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u7684\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236\" width=\"558\" height=\"351\" \/><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\" colspan=\"2\">\n<h2>\u4ec0\u4e48\u662f\u7b49\u79bb\u5b50\u4f53\uff1f<\/h2>\n<p>\u7269\u7406\u5b66\u4e2d\u7684\u201c\u7b49\u79bb\u5b50\u4f53\u201d\u662f\uff1a\u201c\u7531\u6b63\u79bb\u5b50\u548c\u81ea\u7531\u7535\u5b50\u7ec4\u6210\u7684\u9ad8\u5ea6\u7535\u79bb\u6c14\u4f53\u3002\u201d\u56e0\u4e3a\u79bb\u5b50\u548c\u7535\u5b50\u7684\u79bb\u5b50\u5316\u548c\u590d\u5408\u662f\u8fde\u7eed\u53d1\u751f\u7684\uff0c\u7b49\u79bb\u5b50\u4f53\u53d1\u51fa\u7f8e\u4e3d\u7684\u5149\u3002\u56e0\u6b64\uff0c\u7b49\u79bb\u5b50\u4f53\u4e5f\u88ab\u79f0\u4e3a\u7269\u8d28\u7684\u7b2c\u56db\u72b6\u6001\uff0c\u533a\u522b\u4e8e\u56fa\u4f53\u3001\u6db2\u4f53\u548c\u6c14\u4f53\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft wp-image-6081\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Picture2-1.jpg\" alt=\"\u81ea\u7136\u4ea7\u751f\u7684\u7b49\u79bb\u5b50\u4f53\uff1a\u5317\u6781\u5149\" width=\"558\" height=\"350\" \/><\/td>\n<td style=\"width: 50%;vertical-align: top\">\u81ea\u7136\u4ea7\u751f\u7684\u7b49\u79bb\u5b50\u4f53\u6709\u95ea\u7535\u3001\u5317\u6781\u5149\u4ee5\u53ca\u592a\u9633\u548c\u5176\u4ed6\u6052\u661f\u7684\u6838\u6d3b\u52a8\u7b49\u3002\u4eba\u7c7b\u4ece\u7b49\u79bb\u5b50\u4f53\u7684\u81ea\u7136\u53d1\u751f\u4e2d\u5438\u53d6\u7ecf\u9a8c\uff0c\u5e76\u5c06\u5176\u8f6c\u5316\u4e3a\u4eca\u5929\u7528\u4e8e\u8bb8\u591a\u5de5\u827a\u8fc7\u7a0b\u7684\u6280\u672f\u3002\n<p>\u4eba\u9020\u7b49\u79bb\u5b50\u4f53\u6709\u7b49\u79bb\u5b50\u706f\u3001\u6838\u805a\u53d8\u53cd\u5e94\u5806\u548c\u666e\u901a\u8367\u5149\u706f\u7b49\u3002\u8fd8\u6709\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\" colspan=\"2\">\n<h2>\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u7684\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236<\/h2>\n<p>\u7b49\u79bb\u5b50\u4f53\u53ef\u5c06\u6d82\u5c42\u6d82\u8986\u5230\u7845\u7247\u3001\u73bb\u7483\u548c\u91d1\u5c5e\u7247\u7684\u8868\u9762\u4e0a\u3002\u4f8b\u5982\uff0c\u82af\u7247\u4e0a\u7684\u8584\u6d82\u5c42\u53ef\u901a\u8fc7\u7b49\u79bb\u5b50\u4f53\u8680\u523b\u5de5\u827a\u6765\u6784\u9020\u3002\u7b49\u79bb\u5b50\u4f53\u8fd8\u53ef\u6e05\u6d01\u548c\u6fc0\u6d3b\u8868\u9762\uff0c\u5728\u5c06\u4e24\u5757\u6750\u6599\u7c98\u5408\u4e4b\u524d\u589e\u5f3a\u4e24\u8005\u4e4b\u95f4\u7684\u7c98\u5408\u8fc7\u7a0b\u3002<\/p>\n<p>\u5f15\u5165\u53cd\u5e94\u5668\u7684\u6c14\u4f53\u901a\u8fc7\u65bd\u52a0\u7535\u529b\u5f62\u6210\u7535\u79bb\u7b49\u79bb\u5b50\u4f53\u3002\u5bf9\u4e0d\u540c\u6c14\u4f53\u6d41\u91cf\u3001\u53cd\u5e94\u5668\u538b\u529b\u3001\u6e29\u5ea6\u548c\u7535\u529b\u8fdb\u884c\u5e73\u8861\u8c03\u6574\uff0c\u5c06\u6c14\u4f53\u8f6c\u5316\u6210\u4e00\u9053\u7f8e\u4e3d\u7684\u5149\uff0c\u5c06\u5176\u9b54\u529b\u4f20\u64ad\u5230\u53cd\u5e94\u5668\u5185\u7684\u6750\u6599\u4e0a\uff0c\u5373\u7535\u79bb\u7b49\u79bb\u5b50\u4f53\u3002\u6c14\u4f53\u6d41\u91cf\u548c\u53cd\u5e94\u5668\u538b\u529b\u7684\u5e73\u8861\u8bbe\u7f6e\u901a\u8fc7\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u548c\u7535\u5b50\u538b\u529b\u63a7\u5236\u5668\u83b7\u5f97\u3002<\/p><h2>\u6c14\u76f8\/\u5c42\u6c89\u79ef &amp; \u8680\u523b\u6280\u672f<\/h2>\n<p>CVD, PVD, ALD, RIE, IBE, SAB\u662f\u534a\u5bfc\u4f53\u3001\u592a\u9633\u80fd\u548c\u5176\u4ed6\u6d89\u53ca\u8868\u9762\u5904\u7406\u7684\u884c\u4e1a\u5236\u9020\u5de5\u827a\u7684\u7f29\u5199\u3002\u6b64\u7c7b\u8fc7\u7a0b\u901a\u5e38\u5728\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u4e2d\u8fdb\u884c\uff0c\u91c7\u7528\u6c14\u4f53\u6df7\u5408\u7269\u6216\u84b8\u6c7d\u7684\u7b49\u79bb\u5b50\u4f53\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%;vertical-align: top\">\n<h3>\u6c89\u79ef\u6280\u672f<\/h3>\n<ul>\n<li>CVD\uff1a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/li>\n<li>PVD\uff1a\u7269\u7406\u6c14\u76f8\u6c89\u79ef<\/li>\n<li>ALD\uff1a\u539f\u5b50\u5c42\u6c89\u79ef<\/li>\n<\/ul>\n<\/td>\n<td style=\"width: 50%\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-6082\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Picture3-1.jpg\" alt=\"\u73bb\u7483\u6d82\u5c42\uff1a\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u793a\u4f8b \u2013 PVD\" width=\"558\" height=\"350\" \/><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft wp-image-6083\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Picture4-1.jpg\" alt=\"\u7b14\u8bb0\u672c\u7535\u8111\u5c4f\u5e55\uff1a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef-CVD \u793a\u4f8b\" width=\"558\" height=\"350\" \/><\/td>\n<td style=\"width: 50%;vertical-align: top\">\u6b64\u7c7b\u84b8\u6c7d\u548c\u5c42\u6c89\u79ef\u5de5\u827a\u65e8\u5728\u5e94\u7528\u539a\u5ea6\u5728\u7eb3\u7c73\u5230\u5fae\u7c73\u91cf\u7ea7\u8584\u7684\u6d82\u5c42\u3002\u5927\u591a\u6570\u73bb\u7483\u7a97\u90fd\u6709\u4e00\u5c42\u901a\u8fc7\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u6d82\u8986\u8584\u8584\u7684\u9632\u53cd\u5c04\u6d82\u5c42\u3002\n<p>\u60a8\u73b0\u5728\u53ef\u80fd\u6b63\u5728\u770b\u7684\u7535\u8111\u663e\u793a\u5668\u5305\u542b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u5236\u6210\u7684\u6570\u767e\u4e07\u50cf\u7d20\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\" colspan=\"2\">\n<h3>\u8680\u523b\u6280\u672f<\/h3>\n<ul>\n<li>RIE \u662f\u53cd\u5e94\u79bb\u5b50\u8680\u523b<\/li>\n<li>IBE \u662f\u79bb\u5b50\u675f\u8680\u523b<\/li>\n<\/ul>\n<p>\u6b64\u7c7b\u8680\u523b\u6280\u672f\u7528\u4e8e\u53bb\u9664\u534a\u5bfc\u4f53\u82af\u7247\u6216\u4f20\u611f\u5668\u82af\u7247\u8868\u9762\u4e2d\u7684\u9009\u578b\u533a\u57df\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\" colspan=\"2\">\n<h3>\u8868\u9762\u6d3b\u5316\u952e\u5408-SAB<\/h3>\n<p>\u8868\u9762\u6d3b\u5316\u952e\u5408\u6280\u672f\u5e94\u7528\u4e8e\u4f20\u611f\u5668\u548c\u7535\u5b50\u7535\u8def\u677f\u7684\u5236\u9020\u3002<\/p><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%\"><\/td>\n<td style=\"width: 50%\"><\/td>\n<\/tr>\n<tr>\n<td style=\"width: 50%;vertical-align: top\">\n<h2>\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u6d41\u91cf\u7cfb\u7edf<\/h2>\n<p>\u4e0e\u7cfb\u7edf\u5236\u9020\u5546\u5408\u4f5c\uff0cBronkhorst\u901a\u8fc7\u63d0\u4f9b\u5b8c\u6574\u7684\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236\u7cfb\u7edf\u4e3a\u7ec8\u7aef\u7528\u6237\u670d\u52a1\u3002<\/p>\n<p>\u6d41\u91cf\u63a7\u5236\u5668\u5c06\u6c14\u4f53\u6dfb\u52a0\u5230\u53cd\u5e94\u5ba4\u4e2d\uff0c\u5728\u53cd\u5e94\u5ba4\u4e2d\u6c14\u4f53\u88ab\u6fc0\u53d1\u6210\u7b49\u79bb\u5b50\u4f53\uff0c\u4e0e\u6240\u52a0\u6750\u6599\u53d1\u751f\u9884\u671f\u53cd\u5e94\u3002\u538b\u529b\u8c03\u8282\u5668\u8d77\u7740\u91cd\u8981\u4f5c\u7528\u3002\u5176\u5c06\u8fc7\u91cf\u6c14\u4f53\u4ece\u53cd\u5e94\u5668\u4e2d\u6392\u51fa\uff0c\u540c\u65f6\u4fdd\u6301\u5de5\u827a\u538b\u529b\u3002<\/p>\n<p>\u5728\u84b8\u53d1\u7cfb\u7edf\u88c5\u7f6e\u4e2d\uff0c\u53d7\u63a7\u84b8\u53d1\u5668\u6a21\u5757\uff08CEM\uff09\u4e0e\u6db2\u4f53\u6d41\u91cf\u63a7\u5236\u5668\u4ee5\u53ca\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u5668\u76f8\u7ed3\u5408\uff0c\u5411\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u63d0\u4f9b\u84b8\u6c7d\u3002\u5176\u4e0eCEM\u4e0b\u65b9\u7684\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u5668\uff08\u53ef\u6dfb\u52a0\u989d\u5916\u6c14\u4f53\uff09\u4e00\u8d77\u4e3a\u53cd\u5e94\u5ba4\u521b\u9020\u4f18\u5316\u7684\u5de5\u827a\u6761\u4ef6\uff0c\u6c14\u4f53\u5728\u53cd\u5e94\u5ba4\u4e2d\u88ab\u6fc0\u53d1\u5f62\u6210\u7b49\u79bb\u5b50\u4f53\u3002<\/p>\n<p>\u4e0b\u65b9\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u5668\u7528\u4e8e\u6c14\u4f53\u5439\u626b\uff0c\u901a\u5e38\u4e3a\u6c2e\u6c14\uff0c\u7528\u4e8e\u5728\u5de5\u827a\u4e4b\u540e\u4ece\u53cd\u5e94\u5ba4\u4e2d\u51b2\u6d17\u51fa\u4efb\u4f55\u4e0d\u9700\u8981\u7684\u6c14\u4f53\u3002\u7535\u5b50\u538b\u529b\u8c03\u8282\u5668\u5c06\u8fc7\u91cf\u6c14\u4f53\u6df7\u5408\u7269\u6392\u51fa\u53cd\u5e94\u5ba4\uff0c\u540c\u65f6\u4fdd\u6301\u8fc7\u7a0b\u4e2d\u7684\u538b\u529b\u3002<\/p><\/td>\n<td style=\"width: 50%\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright size-full wp-image-6084\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Picture5.jpg\" alt=\"\u914d\u6709\u6db2\u4f53\u548c\u6c14\u4f53\u6d41\u91cf\u63a7\u5236\u5668\u7684\u84b8\u53d1\u7cfb\u7edf\" width=\"558\" height=\"291\" \/><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"excerpt":{"rendered":"<p>\u7b49\u79bb\u5b50\u4f53\u4e0e\u6211\u4eec\u7684\u751f\u6d3b\u6709\u4ec0\u4e48\u5173\u7cfb\uff1f\u5982\u4f55\u5b9e\u73b0\u7b49\u79bb\u5b50\u4f53\u53cd\u5e94\u5668\u7684\u6d41\u91cf\u548c\u538b\u529b\u63a7\u5236\uff1f<\/p>\n","protected":false},"author":12,"featured_media":6085,"template":"","meta":[],"class_list":["post-6079","blog","type-blog","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/blog\/6079"}],"collection":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/blog"}],"about":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/types\/blog"}],"author":[{"embeddable":true,"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/users\/12"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/media\/6085"}],"wp:attachment":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/media?parent=6079"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}