{"id":7685,"date":"2025-01-13T03:42:23","date_gmt":"2025-01-13T03:42:23","guid":{"rendered":"https:\/\/www.bronkhorst-china.com\/?post_type=blog&p=7685"},"modified":"2025-01-13T05:04:40","modified_gmt":"2025-01-13T05:04:40","slug":"miniaturization-to-the-extreme-micro-coriolis-mass-flow-sensor","status":"publish","type":"blog","link":"https:\/\/www.bronkhorst-china.com\/blog\/miniaturization-to-the-extreme-micro-coriolis-mass-flow-sensor\/","title":{"rendered":"\u5fae\u578b\u5316\uff1a\u5fae\u578b\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u8ba1"},"content":{"rendered":"\n\n\n\n
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\u57fa\u4e8eMEMS\u7684\u79d1\u91cc\u5965\u5229\u4eea\u8868\uff0c\u662f\u5fae\u578b\u7684\u79d1\u91cc\u5965\u5229\u8d28\u91cf\u6d41\u91cf\u4f20\u611f\u5668\u3002MEMS\u662fMicro Electro Mechanical System\u7684\u7f29\u5199\u3002\u8fd9\u9879\u7814\u7a76\u59cb\u4e8e2018\u5e74\uff0c\u76ee\u524d\u4ecd\u5728\u8fdb\u884c\u4e2d\u3002<\/p><\/td>\n<\/tr>\n

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MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u6280\u672f<\/h2>\n

MEMS\u6280\u672f\u7c7b\u4f3c\u4e8e\u534a\u5bfc\u4f53\u6280\u672f\uff0c\u4f46\u5b83\u5e94\u7528\u4e8e\u4f20\u611f\u5668\u548c\u5fae\u578b\u673a\u68b0\u5143\u4ef6\uff0c\u800c\u4e0d\u662f\u7535\u5b50\u82af\u7247\u3002MEMS\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5b89\u5168\u6c14\u56ca\u4f20\u611f\u5668\u3001\u55b7\u58a8\u5934\u3001\u538b\u529b\u4f20\u611f\u5668\u3001\u9ea6\u514b\u98ce\u3001\u6307\u5357\u9488\u3001\u52a0\u901f\u5ea6\u8ba1\u3001\u9640\u87ba\u4eea\u548c\u65f6\u57fa\u632f\u8361\u5668\u3002\u4f8b\u5982\uff0c\u667a\u80fd\u624b\u673a\u5305\u542b\u5927\u91cfMEMS\u7ec4\u4ef6\uff0c\u800c\u70ed\u6d41\u91cf\u4f20\u611f\u5668\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7a7a\u8c03\u7cfb\u7edf\u3002<\/p><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n

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\u6676\u7247\u3001\u6781\u5e73\u5706\u76d8<\/figcaption><\/figure><\/p><\/td>\n<\/tr>\n
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MEMS\u82af\u7247\u7531\u6676\u5706\u5236\u6210\u3002\u6676\u7247\u662f\u7531\u7845\u6216\u73bb\u7483\u5236\u6210\u7684\u6241\u5e73\u5706\u76d8\u3002\u5178\u578b\u7684\u6676\u5706\u539a\u5ea6\u4e3a0.5mm\uff0c\u76f4\u5f84\u4e3a6\u82f1\u5bf8\u3002MEMS\u6280\u672f\u5c31\u662f\u5728\u67d0\u4e9b\u533a\u57df\u6dfb\u52a0\u548c\u53bb\u9664\u8fd9\u4e9b\u5c42\u3002\u5e94\u7528\u7684\u5c42\u662f\u9ad8\u8d28\u91cf\u548c\u575a\u56fa\u7684\u6750\u6599\u3002\u6c2e\u5316\u7845\u5c31\u662f\u5176\u4e2d\u4e00\u79cd\uff0c\u5b83\u5728800\u02daC\u5de6\u53f3\u901a\u8fc7\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u65bd\u52a0\u3002

\u7167\u76f8\u5149\u523b\u6280\u672f\u7528\u4e8e\u5b9a\u4e49\u9700\u53bb\u9664\u7684\u533a\u57df\u3002\u5728\u5149\u523b\u4e2d\uff0c\u4e00\u5c42\u5149\u523b\u80f6\u6c89\u79ef\u5728\u6676\u5706\u8868\u9762\u3002\u5149\u523b\u80f6\u901a\u8fc7\u7167\u5c04\u5176\u8868\u9762\u8fdb\u884c\u5316\u5b66\u6539\u53d8\uff0c\u5e76\u5728\u663e\u5f71\u6eb6\u6db2\u4e2d\u9009\u62e9\u6027\u5730\u53bb\u9664\u3002<\/p><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n\n
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\u79d1\u91cc\u5965\u5229\u4f20\u611f\u5668\u7684\u4f18\u52bf<\/h2>\n

\u5927\u591a\u6570MEMS\u6d41\u91cf\u4f20\u611f\u5668\u57fa\u4e8e\u70ed\u5f0f\u6d4b\u91cf\u539f\u7406\u3002\u8be5\u4f20\u611f\u5668\u53ef\u6d4b\u91cf\u6bcf\u5206\u949f\u51e0\u7eb3\u5347\u7684\u6db2\u4f53\u6d41\u91cf\u3002\u4f18\u70b9\u662f\u5feb\u901f\u4e14\u7a33\u5b9a\u3002\u7f3a\u70b9\u662f\u9700\u9488\u5bf9\u6bcf\u79cd\u7279\u5b9a\u6d41\u4f53\u8fdb\u884c\u6821\u51c6\u3002\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u4f20\u611f\u5668\uff0c\u5373\u5305\u542b\u632f\u8361\u7ba1\u7684\u6d41\u91cf\u4f20\u611f\u5668\uff0c\u5176\u4e2d\u8d28\u91cf\u6d41\u91cf\u53d7\u5230\u79d1\u91cc\u5965\u5229\u529b\u7684\u4f5c\u7528\uff0c\u4e0d\u5b58\u5728\u8fd9\u4e2a\u95ee\u9898\u3002\u79d1\u91cc\u5965\u5229\u529b\u4e0e\u8d28\u91cf\u6d41\u91cf\u6210\u6b63\u6bd4\uff0c\u6d4b\u91cf\u7684\u662f\u771f\u6b63\u7684\u8d28\u91cf\u6d41\u91cf\uff0c\u4e0d\u53d7\u6d41\u4f53\u7269\u6027\u5f71\u54cd\u3002<\/p>\n

\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u8ba1\u4e3b\u8981\u7528\u4e8e\u6d4b\u91cf\u5927\u6d41\u91cf\uff08\uff1e\uff11\uff4b\uff47\uff0f\uff48\uff09\uff0c\u56e0\u4e3a\u76f8\u5bf9\u5fae\u5f31\u7684\u79d1\u91cc\u5965\u5229\u529b\u76f8\u5e94\u5730\u66f4\u96be\u76d1\u6d4b\u5c0f\u6d41\u91cf\u3002\u4e3a\u4e86\u83b7\u5f97\u8db3\u591f\u7684\u7075\u654f\u5ea6\u6765\u6d4b\u91cf\uff12\uff47\uff0f\uff48\u4ee5\u4e0b\u7684\u5c0f\u6d41\u91cf\uff0c\u9700\u5c06\u4f20\u611f\u5668\u5c3a\u5bf8\u548c\u7ba1\u58c1\u539a\u5ea6\u964d\u81f3\u6700\u5c0f\uff0c\u4e0d\u9508\u94a2\u4f20\u7edf\u52a0\u5de5\u65e0\u6cd5\u5b9e\u73b0\u3002<\/p>\n

MEMS\u6280\u672f\u5728\u8fd9\u91cc\u53d1\u6325\u4f5c\u7528\u3002\u6211\u4eec\u4e0e\uff34\uff57\uff45\uff4e\uff54\uff45\u5927\u5b66\u5bc6\u5207\u5408\u4f5c\u5f00\u53d1\u4e00\u79cd\u79f0\u4e3a\u201c\u8868\u9762\u901a\u9053\u6280\u672f\u201d\u7684\u5de5\u827a\uff0c\u53ef\u5236\u9020\u5177\u6709\uff11\u5fae\u7c73\u8584\u6c2e\u5316\u7845\u58c1\u7684\u7ba1\u6750\u3002\u6750\u6599\u7684\u9009\u62e9\u4f7f\u8fd9\u4e9b\u7ba1\u6750\u5373\u4f7f\u5728\u5f88\u8584\u7684\u58c1\u539a\u4e0b\u4e5f\u53ef\u4fdd\u6301\u673a\u68b0\u7a33\u5b9a\u6027\u3002<\/p><\/td>\n

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\"\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u4f20\u611f\u5668\"
\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u4f20\u611f\u5668<\/figcaption><\/figure><\/p><\/td>\n<\/tr>\n
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\"\u79d1\u91cc\u5965\u5229\u4f20\u611f\u5668\u7ba1\"
\u79d1\u91cc\u5965\u5229\u4f20\u611f\u5668\u7ba1<\/figcaption><\/figure><\/p><\/td>\n
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\u5de5\u4f5c\u539f\u7406\uff0c\u57fa\u4e8eMEMS\u7684\u79d1\u91cc\u5965\u5229\u4f20\u611f\u5668<\/h2>\n

\u56fe\u793a\u57fa\u4e8eMEMS\u7684\u79d1\u91cc\u5965\u5229\u4f20\u611f\u5668\u7684\u5de5\u4f5c\u539f\u7406\u3002\u6f14\u793a\u6a21\u578b\u4e2d\u5185\u7f6e\u7684\u4f20\u611f\u5668\u57fa\u4e8e\u8fd9\u9879\u6280\u672f\u3002\u6f14\u793a\u6a21\u578b\u53ef\u6d4b\u91cf\u548c\u63a7\u5236\uff10.\uff10\uff11\u5230\uff12\uff47\uff0f\uff48\u7684\u6c14\u4f53\u548c\u6db2\u4f53\u6d41\u91cf\u3002MEMES\u6280\u672f\u7684\u53e6\u4e00\u4e2a\u4f18\u52bf\uff0c\u4eea\u8868\u5185\u90e8\u7684\u79d1\u91cc\u5965\u5229\u7ba1\u5c3a\u5bf8\u5f88\u5c0f\uff0c\u4ee5\u81f3\u4e8e\u7ba1\u7684\u8c10\u632f\u9891\u7387\u5728\uff4b\uff28\uff5a\u8303\u56f4\u5185\u3002\u6bd4\u4f20\u7edf\u7684\u4e0d\u9508\u94a2\u79d1\u91cc\u5965\u5229\u4eea\u5668\u5bf9\u5916\u90e8\u632f\u52a8\u7684\u654f\u611f\u6027\u66f4\u4f4e\u3002<\/p><\/td>\n<\/tr>\n

<\/td>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>","protected":false},"excerpt":{"rendered":"

\u4ec0\u4e48\u662fMEMS\uff1f\u4ec0\u4e48\u662f\u57fa\u4e8eMEMS\u7684\u79d1\u91cc\u5965\u5229\u6d41\u91cf\u8ba1\uff1f<\/p>\n","protected":false},"author":12,"featured_media":7688,"template":"","meta":[],"class_list":["post-7685","blog","type-blog","status-publish","has-post-thumbnail","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/blog\/7685"}],"collection":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/blog"}],"about":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/types\/blog"}],"author":[{"embeddable":true,"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/users\/12"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/media\/7688"}],"wp:attachment":[{"href":"https:\/\/www.bronkhorst-china.com\/wp-json\/wp\/v2\/media?parent=7685"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}