{"id":1275,"date":"2019-12-19T07:48:38","date_gmt":"2019-12-19T07:48:38","guid":{"rendered":"https:\/\/www.bronkhorst.cn\/200233\/?page_id=1275"},"modified":"2024-10-14T05:20:10","modified_gmt":"2024-10-14T05:20:10","slug":"hfcvd","status":"publish","type":"page","link":"https:\/\/www.bronkhorst-china.com\/markets\/surface-treatment\/hfcvd\/","title":{"rendered":"\u6d41\u91cf\u63a7\u5236\u548c\u76d1\u6d4b | \u91d1\u521a\u77f3\u6d82\u5c42"},"content":{"rendered":"<p style=\"text-align: center\"><strong>\u5e94\u7528\u6848\u4f8b<\/strong><\/p>\n<h1 style=\"text-align: center\">\u6d41\u91cf\u63a7\u5236\u548c\u76d1\u6d4b | \u91d1\u521a\u77f3\u6d82\u5c42<\/h1>\n<h3 style=\"text-align: center\">\u4f7f\u7528\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \u2013 HFCVD<\/h3><table class=\" aligncenter\" style=\"width: 99.9999%;border-collapse: collapse\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td style=\"vertical-align: top\" width=\"50%\"><strong>\u91d1\u521a\u77f3\u8010\u78e8\u6027\u5f3a\uff0c\u9002\u5408\u7528\u4e8e\u5207\u524a\u5de5\u5177\u7684\u6d82\u5c42\u3002\u91d1\u521a\u77f3\u6d82\u5c42\u5de5\u827a\u6280\u672f\u826f\u591a\uff0c\u5176\u4e2d\u4e00\u79cd\u662f\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08<\/strong><strong>HFCVD<\/strong><strong>\uff09\u3002<\/strong>\n<table style=\"width: 99.9999%;border-collapse: collapse\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td style=\"padding-right: 20px\">&nbsp;\n<p>HFCVD\u6280\u672f\u4f7f\u7528\u542b\u78b3\u6c14\u4f53\u7a00\u91ca\u6df7\u5408\u7269\u4f8b\u5982\u6c22\u6c14\u4e2d\u7684\u7532\u70f7\u5728\u4e9a\u5927\u6c14\u538b\u4e0b\u901a\u8fc7\u70ed\u4e1d\u70ed\u6d3b\u5316\u3002\u6c14\u4f53\u6df7\u5408\u7269\u548c\u6d41\u91cf\u987b\u8c28\u614e\u63a7\u5236\uff1b\u6d41\u91cf\u63a7\u5236\u5668\u7528\u4e8e\u4fdd\u8bc1\u9002\u5f53\u7684\u6c14\u4f53\u91cf\u548c\u8fc7\u7a0b\u91cd\u590d\u6027\u3002<\/p><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<td style=\"vertical-align: top\" width=\"50%\"><strong><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-7579 size-full\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Diamond-coating-for-cutting-tools-using-flow-control.jpg\" alt=\"\" width=\"630\" height=\"472\" \/><\/strong><\/td>\n<\/tr>\n<tr>\n<td height=\"30\"><\/td>\n<td><\/td>\n<\/tr>\n<\/tbody>\n<\/table><hr \/>\n<table>\n<tbody>\n<tr>\n<td style=\"width: 40%\" align=\"left\" valign=\"top\">\n<h3>\u5e94\u7528\u8981\u6c42<\/h3>\n<p>\u91cd\u8981\u7684\u662f\u6240\u7528\u7684<a href=\"http:\/\/www.bronkhorst-china.com\">\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668<\/a>\u53ef\u786e\u4fdd\u5408\u9002\u7684\u6c14\u4f53\u603b\u91cf\u548c\u8fc7\u7a0b\u7684\u91cd\u590d\u6027\uff1b\u5426\u5219\uff0c\u6240\u83b7\u8584\u819c\u7684\u5747\u5300\u6027\u548c\u6574\u4f53\u8d28\u91cf\u5c06\u5927\u6253\u6298\u6263\u3002\u4eea\u8868\u987b\u53ef\u9760\u5e76\u5177\u6709\u6a21\u62df\u6216\u6570\u5b57\u901a\u4fe1\u529f\u80fd\uff0c\u56e0\u4e3a\u6d41\u7a0b\u4e2d\u6c14\u4f53\u7684\u53ef\u71c3\u6027\u548c\u7206\u70b8\u6027\u6d89\u53ca\u5b89\u5168\u95ee\u9898\uff0c\u987b\u4e25\u5bc6\u63a7\u5236\u548c\u76d1\u6d4b\u3002<\/p><\/td>\n<td style=\"width: 40px;text-align: left;vertical-align: top\"><\/td>\n<td>\n<h2>\u91cd\u8981\u8bae\u9898<\/h2>\n<ul>\n<li>\u9ad8\u91cd\u590d\u6027<\/li>\n<li>\u9ad8\u7cbe\u5ea6<\/li>\n<li>\u5feb\u901f\u54cd\u5e94<\/li>\n<li>\u9ad8\u7a33\u5b9a\u6027<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<table>\n<tbody>\n<tr>\n<td style=\"width: 35%\" align=\"left\" valign=\"top\">\n<h2>\u5de5\u827a\u65b9\u6848<\/h2>\n<p>\u91d1\u521a\u77f3\u8584\u819c\u751f\u4ea7\u7684\u901a\u7528\u65b9\u6cd5\u4e4b\u4e00\u662f\u70ed\u4e1d\u6c14\u76f8\u6c89\u79ef\u6280\u672f\uff08HFCVD\uff09\uff0c\u5176\u4e2d\u6c14\u4f53\u6df7\u5408\u7269\u901a\u8fc7\u52a0\u70ed\u81f32400\u00baC\u7684W\u6216Ta\u7ebf\uff08\u2205100 \u5230 300 \u03bcm)\u8fdb\u884c\u52a0\u70ed\u3002\u901a\u5e38\u4ec5\u9700\u4e24\u79cd\u6c14\u4f53\uff1aH2\u548cCH4\uff0c\u7532\u70f7\u5728\u6c22\u6c14\u4e2d\u4ee51 -2 vol%\u7a00\u91ca\u3002HFCVD\u53cd\u5e94\u5668\u5185\u7684\u603b\u538b\u529b\u901a\u5e38\u572820 mbar \u81f3 200 mbar\u4e4b\u95f4\u53d8\u5316\uff0c\u603b\u6d41\u91cf\u53d6\u51b3\u4e8e\u53cd\u5e94\u5668\u7684\u5c3a\u5bf8\u548c\u51e0\u4f55\u5f62\u72b6\u3002<\/p>\n<p>\u65b0\u578b\u7684\u91d1\u521a\u77f3\u6d82\u5c42\u88ab\u79f0\u4e3a\u7eb3\u7c73\u6676\u91d1\u521a\u77f3(NCD) \uff0c\u4e0e\u5fae\u6676\u91d1\u521a\u77f3\u8584\u819c(MCD)\u76f8\u53cd\u3002NCD\u7684\u7279\u5f81\u5728\u4e8e\u7eb3\u7c73\u5fae\u6676\u5c3a\u5bf8(1 nm \u5230 50 nm)\u548c\u66f4\u5149\u6ed1\u7684\u8868\u9762\uff0c\u4fdd\u7559\u4e86MCD\u7684\u786c\u5ea6\u5e76\u76f8\u5bf9\u4e8eMCD\u5177\u6709\u66f4\u597d\u7684\u8010\u78e8\u635f\u548c\u8010\u6469\u64e6\u6027\u80fd\u3002\u8fd9\u4e9b\u6d82\u5c42\u901a\u5e38\u9700\u8981\u6dfb\u52a0\u7b2c\u4e09\u60f0\u6027\u6c14\u4f53\uff0c\u901a\u8fc7\u589e\u5f3a\u751f\u957f\u8fc7\u7a0b\u4e2d\u7684\u518d\u6210\u6838\u8fc7\u7a0b\u548c\u6539\u53d8\u8154\u5ba4\u5185\u6c14\u4f53\u7684\u70ed\u8d1f\u8377\u6765\u4fc3\u8fdbNCD\u7684\u5f62\u6210\uff0c\u4e5f\u5f71\u54cd\u57fa\u677f\u52a0\u70ed\u3002\u8be5\u7cfb\u7edf\u6bd4MCD\u7cfb\u7edf\u66f4\u590d\u6742\uff0c\u5728\u8fdb\u6599\u6c14\u4f53\u7684\u63a7\u5236\u548c\u76d1\u6d4b\u4e2d\u9700\u8981\u500d\u52a0\u6ce8\u610f\u3002<\/p>\n<p>\u8fd9\u7c7b\u53cd\u5e94\u5668\u7684\u8fdb\u4e00\u6b65\u4fee\u6539\u5305\u62ec\u5728\u5f62\u6210\u671f\u95f4\u7528\u787c(MCD\u548cNCD)\u63ba\u6742\u91d1\u521a\u77f3\u6d82\u5c42\u4f7f\u5176\u5177\u5bfc\u7535\u6027\u3002\u901a\u5e38\u7528\u5230\u542b\u787c(B)\u7269\u8d28\u7684\u6db2\u4f53\u5e76\u4e14\u901a\u8fc7\u8f7d\u6c14\u9f13\u6ce1\u5c06\u787c\u84b8\u6c7d\u5e26\u5230\u70ed\u4e1d\u548c\u91d1\u521a\u77f3\u6d82\u5c42\u4e2d\u3002\u901a\u8fc7\u9009\u62e9\u5408\u9002\u7684\u787c\u6d53\u5ea6\u5e76\u8c03\u8282\u901a\u8fc7\u7684\u6c14\u4f53\u6765\u8c03\u8282\u63ba\u6742\u6c34\u5e73\u3002\u5728\u8fdb\u884cNCD\u65f6\uff0c\u56e0\u4e3a\u6d89\u53ca\u4e09\u79cd\u6c14\u4f53\uff0c\u4efb\u52a1\u53d8\u5f97\u8d8a\u53d1\u56f0\u96be\u3002\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\uff08\u4f8b\u5982<a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\">EL-FLOW Select<\/a>, <a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/low-p-flow\/\">LOW-\u0394P-FLOW<\/a> \u6216 <a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/in-flow\/\">IN-FLOW<\/a>\u7cfb\u5217)\u5728\u6d89\u53caCVD\u5de5\u827a\u7684\u5e94\u7528\u4e2d\u53d1\u6325\u7740\u5173\u952e\u4f5c\u7528\u3002<\/p><\/td>\n<td style=\"width: 40px;text-align: left;vertical-align: top\"><\/td>\n<td style=\"text-align: right;vertical-align: top\"><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-1301 size-full\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/st-flow-scheme-hfcvd.jpg\" alt=\"\" width=\"630\" height=\"472\" srcset=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/st-flow-scheme-hfcvd.jpg 630w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/st-flow-scheme-hfcvd-300x225.jpg 300w\" sizes=\"(max-width: 630px) 100vw, 630px\" \/><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<p style=\"text-align: center\"><style type=\"text\/css\">.easingslider-1456 { max-width: 630px; }.easingslider-1456 .easingslider-image { max-height: 472px; max-width: 630px; }.easingslider-1456 .easingslider-fade-in, .easingslider-fade-out { -webkit-animation-duration: 400ms; -moz-animation-duration: 400ms; animation-duration: 400ms; }<\/style><script type=\"text\/javascript\">window.EasingSlider1456 = {\"width\":630,\"height\":472,\"singleItem\":true,\"items\":1,\"itemsDesktop\":false,\"itemsDesktopSmall\":false,\"itemsTablet\":false,\"itemsTabletSmall\":false,\"itemsMobile\":false,\"responsive\":true,\"lazyLoad\":true,\"autoPlay\":4000,\"slideSpeed\":400,\"navigation\":true,\"navigationText\":[\"\",\"\"],\"pagination\":false,\"autoHeight\":false,\"mouseDrag\":false,\"touchDrag\":false,\"addClassActive\":true,\"transitionStyle\":false};<\/script><div data-id=\"1456\" class=\"easingslider easingslider-1456 easingslider-container easingslider-resizing-enabled easingslider-aspect-ratio easingslider-arrows-outside\"><div class=\"easingslider-slide\"><img decoding=\"async\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/plugins\/easing-slider\/assets\/images\/placeholder-pixel.png\" data-src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/st-hot-filament-630x472.jpg\" alt=\"\" title=\"\" class=\"easingslider-image easingslider-lazy\" \/><\/div><div class=\"easingslider-slide\"><img decoding=\"async\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/plugins\/easing-slider\/assets\/images\/placeholder-pixel.png\" data-src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/st-camera-lens-630x472.jpg\" alt=\"\" title=\"\" class=\"easingslider-image easingslider-lazy\" \/><\/div><\/div><\/p>\n<div class=\"related-categories\"><hr \/><h2>\u63a8\u8350\u4ea7\u54c1<\/h2><div class=\"row\"><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 58\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-150x150.png\" class=\"img-fluid\" alt=\"\" srcset=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-150x150.png 150w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-314x314.png 314w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-100x100.png 100w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/div><span class=\"h3 uppercase\">EL-FLOW SELECT<\/span><\/a><\/div><\/div><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 60\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/in-flow\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-111AI_-150x150.png\" class=\"img-fluid\" alt=\"\" \/><\/div><span class=\"h3 uppercase\">IN-FLOW<\/span><\/a><\/div><\/div><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 63\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/low-p-flow\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/low-dp-flow-f-102e-150x150.png\" class=\"img-fluid\" alt=\"\" \/><\/div><span class=\"h3 uppercase\">LOW-\u0394P-FLOW<\/span><\/a><\/div><\/div><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u5e94\u7528\u6848\u4f8b \u6d41\u91cf\u63a7\u5236\u548c\u76d1\u6d4b | \u91d1\u521a\u77f3\u6d82\u5c42 \u4f7f\u7528\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef \u2013 HFCVD \u91d1\u521a\u77f3\u8010\u78e8\u6027\u5f3a\uff0c\u9002\u5408\u7528\u4e8e\u5207\u524a\u5de5\u5177\u7684\u6d82\u5c42\u3002\u91d1\u521a\u77f3\u6d82\u5c42\u5de5\u827a\u6280\u672f\u826f\u591a\uff0c\u5176\u4e2d\u4e00\u79cd\u662f\u70ed\u4e1d\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08HFCVD\uff09\u3002 &nbsp; HFCVD\u6280\u672f\u4f7f\u7528\u542b\u78b3\u6c14\u4f53\u7a00\u91ca\u6df7\u5408\u7269\u4f8b\u5982\u6c22\u6c14\u4e2d\u7684\u7532\u70f7\u5728\u4e9a\u5927\u6c14\u538b\u4e0b\u901a\u8fc7\u70ed\u4e1d\u70ed\u6d3b\u5316\u3002\u6c14\u4f53\u6df7\u5408\u7269\u548c\u6d41\u91cf\u987b\u8c28\u614e\u63a7\u5236\uff1b\u6d41\u91cf\u63a7\u5236\u5668\u7528\u4e8e\u4fdd\u8bc1\u9002\u5f53\u7684\u6c14\u4f53\u91cf\u548c\u8fc7\u7a0b\u91cd\u590d\u6027\u3002 \u5e94\u7528\u8981\u6c42 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