{"id":2002,"date":"2020-03-19T06:32:13","date_gmt":"2020-03-19T06:32:13","guid":{"rendered":"http:\/\/hyu7334150001.my3w.com\/?page_id=2002"},"modified":"2024-03-12T02:23:04","modified_gmt":"2024-03-12T02:23:04","slug":"a087-en04","status":"publish","type":"page","link":"https:\/\/www.bronkhorst-china.com\/markets\/renewable-energy\/a087-en04\/","title":{"rendered":"\u592a\u9633\u80fd\u751f\u4ea7\u4e2d\u7684\u6d41\u91cf\u63a7\u5236"},"content":{"rendered":"<p style=\"text-align: center\"><span class=\"label label-primary\">Application note A087-EN04<\/span><\/p>\n<h1 style=\"text-align: center\">\u592a\u9633\u80fd\u7535\u6c60\u751f\u4ea7\u4e2d\u7684\u6d41\u91cf\u63a7\u5236<\/h1>\n<table class=\" aligncenter\" style=\"width: 99.9999%;border-collapse: collapse\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td style=\"vertical-align: top\" width=\"50%\"><strong>\u5149\u4f0f\u592a\u9633\u80fd\u7535\u6c60\uff08\u5c06\u9633\u5149\u8f6c\u5316\u4e3a\u7535\u80fd\u7684\u7535\u6c60\uff09\u751f\u4ea7\u8fc7\u7a0b\u5305\u62ec\u8bb8\u591a\u6b65\u9aa4\uff0c\u5982\u7845\u7247\u7684\u6e05\u6d17\u548c\u8680\u523b\uff0c\u6216\u4f7f\u7528\u7269\u7406\u6216\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\uff08PVD\/CVD\uff09\u5c42\u79ef\u3002<\/strong>\n<table style=\"width: 99.9999%;border-collapse: collapse\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td style=\"padding-right: 20px\">&nbsp;\n<p>\u7528\u4e8e\u751f\u4ea7\u592a\u9633\u80fd\u7535\u6c60\u7684\u673a\u5668\u7531\u4e00\u7cfb\u5217\u5de5\u827a\u5ba4\u7ec4\u6210\uff0c\u5728\u8fd9\u4e9b\u5de5\u827a\u5ba4\u4e2d\uff0c\u751f\u4ea7\u6b65\u9aa4\u5728\u53d7\u63a7\u6761\u4ef6\u4e0b\u8fdb\u884c\uff0c\u4e2d\u95f4\u6709\u9694\u79bb\u3002\u6bcf\u4e00\u4e2a\u6b65\u9aa4\u90fd\u6d89\u53ca\u5230\u6c14\u4f53\u6216\u6db2\u4f53\u5316\u5408\u7269\u7684\u4f9b\u5e94\u3002Bronkhorst\u4e3a\u4e00\u5bb6\u6bcf\u5468\u9700\u8981\u751f\u4ea7\u4e24\u5230\u4e09\u53f0\u8fd9\u7c7b\u673a\u5668\u7684\u516c\u53f8\u63d0\u4f9b\u8d28\u91cf\u6d41\u91cf\u88c5\u7f6e\u3002<\/p><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/td>\n<td style=\"vertical-align: top\" width=\"50%\">\n<figure id=\"attachment_7260\" aria-describedby=\"caption-attachment-7260\" style=\"width: 630px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-7260 size-full\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/Flow-control-in-solar-cell-production.jpg\" alt=\"\u592a\u9633\u80fd\u7535\u6c60\u677f\u751f\u4ea7\u7ebf\" width=\"630\" height=\"472\" \/><figcaption id=\"caption-attachment-7260\" class=\"wp-caption-text\">\u73b0\u4ee3\u5149\u660e\u5de5\u5382\u7684\u592a\u9633\u80fd\u7535\u6c60\u677f\u751f\u4ea7\u7ebf\u3002\u592a\u9633\u80fd\u7535\u6c60\u677f\u6b63\u5728\u8f93\u9001\u673a\u4e0a\u7ec4\u88c5<\/figcaption><\/figure><\/td>\n<\/tr>\n<tr>\n<td height=\"30\"><\/td>\n<td><\/td>\n<\/tr>\n<\/tbody>\n<\/table><hr \/>\n<table>\n<tbody>\n<tr>\n<td style=\"width: 40%\" align=\"left\" valign=\"top\">\n<h3>\u5e94\u7528\u8981\u6c42<\/h3>\n<p>\u6bcf\u53f0\u5149\u4f0f\u592a\u9633\u80fd\u7535\u6c60\u5236\u9020\u673a\u603b\u5171\u753110\u4e2a\u771f\u7a7a\u5904\u7406\u5ba4\u7ec4\u6210\uff0c\u5229\u7528\u51e0\u5341\u4e2a\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u6765\u4f9b\u5e94\u6c14\u4f53\u3001\u6db2\u4f53\u548c\u84b8\u6c7d\u3002\u5bf9\u4e8e\u8be5\u5e94\u7528\uff0c\u6d41\u91cf\u8bbe\u5907\u5fc5\u987b\u51c6\u786e\u5730\u63d0\u4f9b500\u62161000sccm\uff08\u6216\u4efb\u4f55\u671f\u671b\u503c\uff09\uff0c\u4e14\u5fc5\u987b\u65e5\u590d\u4e00\u65e5\u5730\u53d1\u751f\u3002\u56e0\u6b64\u91cd\u590d\u6027\u548c\u51c6\u786e\u6027\u540c\u6837\u91cd\u8981\u3002<\/p><\/td>\n<td style=\"width: 40px;text-align: left;vertical-align: top\"><\/td>\n<td>\n<h3>\u91cd\u8981\u8bae\u9898<\/h3>\n<ul>\n<li>\u51c6\u786e\u4f9b\u5e94\u6c14\u4f53\u3001\u6db2\u4f53\u548c\u84b8\u6c7d<\/li>\n<li>\u91cd\u590d\u6027<\/li>\n<li>\u5355\u53f0\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u53ef\u7528\u4e8e\u591a\u79cd\u6c14\u4f53<\/li>\n<\/ul>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<table>\n<tbody>\n<tr>\n<td style=\"width: 35%\" align=\"left\" valign=\"top\">\n<h3>\u5de5\u827a\u65b9\u6848<\/h3>\n<p>Bronkhorst\u4ea4\u4ed8\u7684\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u7528\u4e8e\u51c6\u786e\u548c\u91cd\u590d\u6027\u7684\u6c14\u4f53\u3001\u84b8\u6c7d\u548c\u6db2\u4f53\u4f9b\u5e94\u3002\u901a\u5e38\u9009\u62e9Bronkhorst <a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\">EL-FLOW Select<\/a>\u70ed\u5f0f\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u7528\u4e8e\u4f9b\u6c14\u3002\u5c31\u6db2\u4f53\u800c\u8a00\uff0c\u5728\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PE-CVD\uff09\u8fc7\u7a0b\u4e2d\uff0c\u5927\u591a\u6570\u6db2\u4f53\u901a\u8fc7<a href=\"https:\/\/www.bronkhorst-china.com\/products\/vapour-flow\/cem\/\">CEM<\/a>\uff08\u63a7\u5236\u84b8\u53d1\u4e0e\u6df7\u5408\uff09\u7cfb\u7edf\u84b8\u53d1\u4e3a\u84b8\u6c7d\uff0c\u4ee5\u4fbf\u5728\u57fa\u5e95\u8868\u9762\u53d1\u751f\u53cd\u5e94\u3002<\/p>\n<p><a href=\"https:\/\/www.bronkhorst-china.com\/products\/vapour-flow\/cem\/\">CEM<\/a>\u7cfb\u7edf\u7531\uff08\u70ed\u5f0f\u6216\u79d1\u6c0f\uff09\u6db2\u4f53\u6d41\u91cf\u63a7\u5236\u5668\uff08<a href=\"https:\/\/www.bronkhorst-china.com\/products\/liquid-flow\/liqui-flowl10-l20\/\">LIQUI-FLOW<\/a> \u6216 <a href=\"https:\/\/www.bronkhorst-china.com\/products\/liquid-flow\/mini-cori-flow-l\/\">mini CORI-FLOW<\/a>) \u3001\u8f7d\u6c14\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668(\u4f8b\u5982 <a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\">EL-FLOW Select<\/a>)\u548c\u6e29\u5ea6\u53d7\u63a7\u7684\u6df7\u5408\u84b8\u53d1\u88c5\u7f6e\u7ec4\u6210\u3002<\/p>\n<p>Bronkhorst\u6d41\u91cf\u88c5\u7f6e\u7528\u4e8e\u4f20\u7edf\u7845\u57fa\u592a\u9633\u80fd\u7535\u6c60\u7684\u6676\u4f53\u7845\u7247\u5e94\u7528\u5c42\uff0c\u4ee5\u53ca\u5728\u67d4\u6027\u57fa\u677f\u4e0a\u5236\u9020\u4f5c\u4e3a\u7b2c\u4e8c\u4ee3\u975e\u6676\u7845\u57fa\u8584\u819c\u592a\u9633\u80fd\u7535\u6c60\u7ec4\u4ef6\u7684\u8584\u5c42\u3002<\/p>\n<p>\u8ba9\u6211\u4eec\u901a\u8fc7\u4e00\u4e2a\u4f8b\u5b50-\u5982\u4f55\u5c06\u201cp-n\u7ed3\u201d\u6c89\u79ef\u5728\u67d4\u6027\u57fa\u6750\u4e0a\u7684-\u6765\u66f4\u6df1\u5165\u5730\u63a2\u8ba8\u8fd9\u4e2a\u8fc7\u7a0b\uff0c\u67d4\u6027\u57fa\u6750\u662f\u5149\u4f0f\uff08PV\uff09\u592a\u9633\u80fd\u7535\u6c60\u5c06\u592a\u9633\u5149\u8f6c\u6362\u6210\u7535\u5b50\u7684\u91cd\u8981\u90e8\u5206\u3002\u5728\u4e0d\u540c\u7684\u5de5\u827a\u5ba4\u4e2d\uff0c\u4e24\u5c42\u4e0d\u540c\u53c2\u6742\u5242\u7684\u7845\u5c42\u5fc5\u987b\u76f8\u4e92\u91cd\u53e0\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u5de5\u827a\u4ecb\u8d28\u662f\u5e26\u6709\u5fae\u91cf\u6c14\u4f53\u7684\u7845\u70f7(SiH4)\u548c\u6c22(H2)\uff0c\u5176\u4e2dn\u53c2\u6742\u5c42\u4e3a\u78f7\u5316\u6c22(PH3)\uff0cp\u53c2\u6742\u5c42\u4e3a\u4e8c\u787c\u70f7(B2H6)\u3002\u6dfb\u52a0\u6c14\u6001NF3\u4ee5\u4fbf\u4f7f\u7528\u7b49\u79bb\u5b50\u4f53\u6e05\u6d01\u6c89\u79ef\u6b65\u9aa4\u4e4b\u95f4\u7684\u771f\u7a7a\u5904\u7406\u5ba4\u3002<\/p>\n<p><a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\">EL-FLOW Select<\/a> \u70ed\u5f0f\u8d28\u91cf\u6d41\u91cf\u8ba1\u7684\u4e00\u5927\u7279\u70b9\u662f\uff0c\u5176\u53ef\u4e3a\u4e0d\u540c\u7684\u6c14\u4f53\u63d0\u4f9b\u591a\u4e2a(~5)\u6821\u51c6\u66f2\u7ebf\uff0c\u4f18\u70b9\u662f\u6bcf\u53f0\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u90fd\u9002\u7528\u4e8e\u5177\u6709\u4e00\u5b9a\u53ef\u6bd4\u6027\u7684\u591a\u79cd\u6c14\u4f53\uff0c\u56e0\u800c\u6570\u91cf\u76f8\u5bf9\u8f83\u5c11\u3002\u8be5\u6d41\u91cf\u8ba1\u7684\u6709\u6548\u4f7f\u7528\u53ef\u964d\u4f4e\u6210\u672c\u3002<\/p>\n<p>\u8fd9\u4e9b\u88c5\u7f6e\u4e5f\u9002\u7528\u4e8e\u4f7f\u7528\u771f\u7a7a\u6280\u672f\u7684\u76f8\u8fd1\u5e94\u7528\u9886\u57df\uff0c\u4f8b\u5982\u534a\u5bfc\u4f53\u5de5\u4e1a\uff0c\u4ee5\u53ca\u7528\u4e8e\u663e\u793a\u548c\u7167\u660e\u7684\u53d1\u5149\u4e8c\u6781\u7ba1(LEDs)\u5236\u9020\u3002<\/p><\/td>\n<td style=\"width: 40px;text-align: left;vertical-align: top\"><\/td>\n<td><img loading=\"lazy\" decoding=\"async\" class=\"alignright wp-image-2003 size-full\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/a087-flowscheme.jpg\" alt=\"\u592a\u9633\u80fd\u751f\u4ea7\u4e2d\u7684\u6d41\u91cf\u63a7\u5236\" width=\"630\" height=\"472\" srcset=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/a087-flowscheme.jpg 630w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/a087-flowscheme-300x225.jpg 300w\" sizes=\"(max-width: 630px) 100vw, 630px\" \/><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<div class=\"related-categories\"><hr \/><h2>\u63a8\u8350\u4ea7\u54c1<\/h2><div class=\"row\"><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 74\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/vapour-flow\/cem\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/cem-schema-2016-minicf-el-flow-150x150.png\" class=\"img-fluid\" alt=\"\" \/><\/div><span class=\"h3 uppercase\">CEM\u6280\u672f\uff1a\u53ef\u63a7\u84b8\u53d1\u6df7\u5408<\/span><\/a><\/div><\/div><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 58\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/gas-flow\/el-flow-select\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-150x150.png\" class=\"img-fluid\" alt=\"\" srcset=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-150x150.png 150w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-314x314.png 314w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/F-201CV_-100x100.png 100w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/div><span class=\"h3 uppercase\">EL-FLOW SELECT<\/span><\/a><\/div><\/div><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 96\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/liquid-flow\/liqui-flowl10-l20\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/liqui-flow-l23v12-150x150.png\" class=\"img-fluid\" alt=\"\" \/><\/div><span class=\"h3 uppercase\">LIQUI-FLOW\u2122<\/span><\/a><\/div><\/div><div class=\"col-12 col-sm-6 col-md-6 col-lg-3\"><div class=\"category-item 68\"><a href=\"https:\/\/www.bronkhorst-china.com\/products\/liquid-flow\/mini-cori-flow-l\/\"><div class=\"image\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/M12V14I_-150x150.png\" class=\"img-fluid\" alt=\"\" srcset=\"https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/M12V14I_-150x150.png 150w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/M12V14I_-314x314.png 314w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/M12V14I_-80x80.png 80w, https:\/\/www.bronkhorst-china.com\/wp-content\/uploads\/M12V14I_-100x100.png 100w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/div><span class=\"h3 uppercase\">mini CORI-FLOW<\/span><\/a><\/div><\/div><\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Application note A087-EN04 \u592a\u9633\u80fd\u7535\u6c60\u751f\u4ea7\u4e2d\u7684\u6d41\u91cf\u63a7\u5236 \u5149\u4f0f\u592a\u9633\u80fd\u7535\u6c60\uff08\u5c06\u9633\u5149\u8f6c\u5316\u4e3a\u7535\u80fd\u7684\u7535\u6c60\uff09\u751f\u4ea7\u8fc7\u7a0b\u5305\u62ec\u8bb8\u591a\u6b65\u9aa4\uff0c\u5982\u7845\u7247\u7684\u6e05\u6d17\u548c\u8680\u523b\uff0c\u6216\u4f7f\u7528\u7269\u7406\u6216\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6280\u672f\uff08PVD\/CVD\uff09\u5c42\u79ef\u3002 &nbsp; \u7528\u4e8e\u751f\u4ea7\u592a\u9633\u80fd\u7535\u6c60\u7684\u673a\u5668\u7531\u4e00\u7cfb\u5217\u5de5\u827a\u5ba4\u7ec4\u6210\uff0c\u5728\u8fd9\u4e9b\u5de5\u827a\u5ba4\u4e2d\uff0c\u751f\u4ea7\u6b65\u9aa4\u5728\u53d7\u63a7\u6761\u4ef6\u4e0b\u8fdb\u884c\uff0c\u4e2d\u95f4\u6709\u9694\u79bb\u3002\u6bcf\u4e00\u4e2a\u6b65\u9aa4\u90fd\u6d89\u53ca\u5230\u6c14\u4f53\u6216\u6db2\u4f53\u5316\u5408\u7269\u7684\u4f9b\u5e94\u3002Bronkhorst\u4e3a\u4e00\u5bb6\u6bcf\u5468\u9700\u8981\u751f\u4ea7\u4e24\u5230\u4e09\u53f0\u8fd9\u7c7b\u673a\u5668\u7684\u516c\u53f8\u63d0\u4f9b\u8d28\u91cf\u6d41\u91cf\u88c5\u7f6e\u3002 \u5e94\u7528\u8981\u6c42 \u6bcf\u53f0\u5149\u4f0f\u592a\u9633\u80fd\u7535\u6c60\u5236\u9020\u673a\u603b\u5171\u753110\u4e2a\u771f\u7a7a\u5904\u7406\u5ba4\u7ec4\u6210\uff0c\u5229\u7528\u51e0\u5341\u4e2a\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u6765\u4f9b\u5e94\u6c14\u4f53\u3001\u6db2\u4f53\u548c\u84b8\u6c7d\u3002\u5bf9\u4e8e\u8be5\u5e94\u7528\uff0c\u6d41\u91cf\u8bbe\u5907\u5fc5\u987b\u51c6\u786e\u5730\u63d0\u4f9b500\u62161000sccm\uff08\u6216\u4efb\u4f55\u671f\u671b\u503c\uff09\uff0c\u4e14\u5fc5\u987b\u65e5\u590d\u4e00\u65e5\u5730\u53d1\u751f\u3002\u56e0\u6b64\u91cd\u590d\u6027\u548c\u51c6\u786e\u6027\u540c\u6837\u91cd\u8981\u3002 \u91cd\u8981\u8bae\u9898 \u51c6\u786e\u4f9b\u5e94\u6c14\u4f53\u3001\u6db2\u4f53\u548c\u84b8\u6c7d \u91cd\u590d\u6027 \u5355\u53f0\u8d28\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u53ef\u7528\u4e8e\u591a\u79cd\u6c14\u4f53 \u5de5\u827a\u65b9\u6848 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