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FF-C1x

緊湊型氣體質(zhì)量流量控制器

緊湊型氣體質(zhì)量流量控制器

  • 快速穩(wěn)定控制
  • 集成氣體轉(zhuǎn)換模塊
  • 22種氣體嵌入
  • 多參數(shù)輸出：質(zhì)量流量、溫度和壓力
  • USB-C和藍(lán)牙通信
  • Namur NE107狀態(tài)指示

樣冊(cè)下載 產(chǎn)品列表

FF-C1x緊湊型氣體質(zhì)量流量控制器

小流量氣體質(zhì)量流量控制器

FLEXI-FLOW 緊湊型質(zhì)量流量控制器適用于工作壓力在真空和17 bar(a)條件下準(zhǔn)確測(cè)量0…500 mln/min 和 0…20 ln/min之間的流量。儀表結(jié)合基于毛細(xì)管MEMS技術(shù)快速穩(wěn)定的熱式質(zhì)量流量傳感器和可靠準(zhǔn)確的旁路結(jié)構(gòu)。基于TCS技術(shù)，建立準(zhǔn)確的質(zhì)量流量測(cè)量，不受溫度和管路壓力變化影響。與集成溫度和上下游壓力傳感器相結(jié)合，22種氣體的嵌入式數(shù)據(jù)庫(kù)實(shí)現(xiàn)精準(zhǔn)集成轉(zhuǎn)換。多參數(shù)儀表可提供過程信息。

FLEXI-FLOW緊湊型質(zhì)量流量控制器目前可選：

  • “預(yù)配置高端型” (PA), 量程比 1:500, 流量 + 溫度 + 上下游壓力,?4 個(gè)量程 (FS, N2當(dāng)量):
    Type FF-A500 – 500 mln/min
    Type FF-A2K0 – 2 ln/min
    Type FF-A5K0 – 5 ln/min
    Type FF-A20K – 20 ln/min
  • “預(yù)配置標(biāo)準(zhǔn)型”(PS), 量程比 1:50, 流量 + 溫度, 4個(gè)量程 (FS, N2當(dāng)量):
    Type FF-S500 – 500 mln/min
    Type FF-S2K0 – 2 ln/min
    Type FF-S5K0 – 5 ln/min
    Type FF-S20K – 20 ln/min
  • “定制”(BtO),?量程比 1:1000; 可選量程0.5 和 20 ln/min (FS, N2當(dāng)量),
    Type FF-C10: 流量 + 溫度
    Type FF-C11: 流量 + 溫度 + 上下游壓力;
    BtO型號(hào)也適用于多通道配置，高達(dá)8個(gè)通道。

技術(shù)參數(shù)

Measurement / control system
Flow range (intermediate ranges available) min. 0…500 mln/min
max. 0…20 ln/min
(based on N2)
Pressure ranges PA: 0…17 bar(a)
PS: not available
BtO: FF-C10: not available / FF-C11: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration) PA: ±0,8% Rd plus ±0,2% FS (N2/Air/O2);
PS: ±1,5% Rd plus ±0,5% FS (N2/Air/O2);
BtO: Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2);
for other gases add conversion uncertainty; see?multi gas table;
Repeatability Flow sensor: < ±0,2% Rd;
Pressure sensors: < ±0,2% FS
Turndown ratio PS: 1:50
PA: 1:500
BtO: up to 1:1000
Max. operating pressure 16?bar g
Multi Gas/Multi Range embedded gas data for?22 unique gases?plus any mixture of these gases
Settling time (in control, typical) <?150 ms
Long term stability < 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability < ±?0,1% FS (typical for 1 ln/min N2)
Operating temperature 0…50?°C
Mounting any position, attitude sensitivity negligible
Temperature sensitivity Flow sensor: zero 0,0015% FS/oC; span 0,03% Rd/oC;
Pressure sensors: zero 0,16 mbar/oC; span 0,05% Rd/oC
Temperature accuracy ± 0,2 oC (instrument body temperature)
Accuracy pressure sensors ±0,5% FS
Pressure sensitivity standard: < 0,15% Rd/bar typical N2;
with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboard tested < 2 x 10-9?mbar l/s He
Leak-by through closed valve typical < 1 x 10-4?mbar·l/s He
Mechanical parts
Material (wetted parts) aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality <?1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN) 16 bar(g) / 250 psig
Max. ΔP 16 bar(d);
20 ln/min models: 5 bar (d)
Process connections BtO: compression type, push-in or face seal couplings;
PS / PA: to be ordered separately
Seals FKM 51415; valve seat: FFKM with PI film
BtO option: for other materials contact factory
Weight 200 g with Aluminium body, 300 g with SS 316 body
Ingress protection IP40
Instrument body BtO: Aluminium or Stainless steel (selectable);
PS / PA: Aluminium
Electrical properties
Power supply 24 Vdc ± 10%
Max. power consumption 2,0 Watt
Digital communication Modbus RTU or FLOW-BUS (selectable)
Support interface USB-C port for easy setup;
Optional Bluetooth connection for monitoring
Electrical connection 9-pin D-sub (male)
Electrical connection
CE EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU

技術(shù)參數(shù)如有變更，恕不另行通知。

更多資料

樣冊(cè)
FLEXI-FLOW brochure Download
說明書
Quick installation guide FLEXI-FLOW Download
快速安裝指南 FLEXI-FLOW Download
使用說明書 FLEXI-FLOW Download
安裝圖
FLEXI-FLOW Compact Modbus-RTU / FLOW-BUS Download
尺寸圖
Dimensions FLEXI-FLOW Compact MFC-MFM Download
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